摘要
无线传感器系统可以基于感应耦合原理为植入设备无线供电并通过外部接收器测量生理信息相关参数。所设计的无线压力感测系统包括两个模块:无线无源压力传感器和传感器外部无线读出系统。基于三种混合比的聚二甲基硅氧烷(PDMS)制造了双线圈配置的LC谐振电感耦合压力传感器装置,用于传感器频率-压力特性测试。完成了传感器外部读出电路的构建,电路能够识别阻抗曲线的峰值。测量结果表明:所设计的装置实现了2 cm的合适测量距离,并且对于25︰1混合比制备的PDMS压力传感器,在0~40 N的压力范围内,传感器的灵敏度约为-14.5 kHz/N。
The wireless sensor system can wirelessly power the implanted device and measure physiological information related parameters through an external receiver based on the principle of inductive coupling.Designed wireless pressure sensing system includes two modules:a wireless passive pressure sensor and a sensor external wireless readout system.A two-coil configuration LC resonant inductive coupling pressure sensor device is fabricated based on three mixing ratios of polydimethylsiloxane(PDMS)for sensor frequency-pressure characteristic test.The construction of the sensor external readout circuit is completed,which can recognize the peak of the impedance curve.Measurement results demonstrate that the device achieves a suitable measurement distance of 2 cm and the sensitivity of the sensor is about-14.5 kHz/N over a range of 0~40 N for PDMS pressure sensor of mixing ration 25︰1.
作者
张劲弓
赵明
孙旭光
李彤
刘春秀
薛宁
ZHANG Jingong;ZHAO Ming;SUN Xuguang;LI Tong;LIU Chunxiu;XUE Ning(School of Microelectronics,University of Science and Technology of China,Hefei 230026,China;State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100190,China;Department of Neurosurgery,Fourth Medical Center,Chinese PLA General Hospital,Beijing 100048,China)
出处
《传感器与微系统》
CSCD
北大核心
2021年第9期71-73,77,共4页
Transducer and Microsystem Technologies
基金
国家重点研发计划资助项目(2019YFC200028)
国家自然科学基金资助项目(61774157,81771388,61802363)
北京自然科学基金资助项目(4182075)。
关键词
无线传感器
电感耦合
读出系统
聚二甲基硅氧烷
wireless sensor
inductive coupling
readout system
polydimethylsiloxane(PDMS)