摘要
传统外延阻挡杂质带探测器由于其材料物性和特殊的结构设计存在很强的反射,这些能量损失非常不利于器件的探测性能。报道了一种类光栅双层超构表面微结构阵列,并将此人工微结构引入到外延阻挡杂质带红外探测器以抑制对入射光的反射。实验结果显示,具有超构表面微结构阵列的器件在波长30μm处反射率低于3%,在25.3∼32.2μm波段范围内反射率低于20%。同时,该超表面减反微结构对入射光的偏振还具有很强的选择性,符合第四代焦平面发展需求。
When an infrared wave is incident on the traditional epitaxial blocked impurity band detector,part of wave energy would be reflected by the device due to its special structural design and the properties of the constituent materials. The energy loss is obviously detrimental to the performance of the device. Here,a kind of bilayer metasurfacebased microstructure array is introduced into the epitaxial blocked impurity band infrared detector for suppression of reflection. Experimental results show that the reflectance of the proposed metasurface-based device is lower than 20% in the wavelength range of 25. 3~32. 2 μm,particularly,which is even less than 3% at the wavelength of 30 μm. Meanwhile,the proposed metasurface antireflection coating also has strong polarization selectivity for incident wave,which meets the requirement for the fourth-generation focal plane arrays development.
作者
王超
姚尧
文政绩
郝加明
胡古今
戴宁
WANG Chao;YAO Yao;WEN Zheng-Ji;HAO Jia-Ming;HU Gu-Jin;DAI Ning(State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China;Department of Physics,College of Mathematics and Science,Shanghai Normal University,Shanghai 200234,China;College of Physics and Optoelectronic Engineering,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China;Jiangsu Collaborative Innovation Center of Photovolatic Science and Engineering,Changzhou 213164,China)
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
2021年第4期459-464,共6页
Journal of Infrared and Millimeter Waves
基金
国家重点研发计划(2017YFA0205800)
国家自然科学基金(11933006,61805060,61290304)。
关键词
阻挡杂质带
红外探测器
减反
双层超表面
blocked impurity band
infrared detector
antireflection
bilayer metasurfaces