金属腔量子阱红外探测器共振波长的角度依赖性

Angular dependence of resonance wavelength in metallic cavity quantum well infrared photodetector

测量了金属腔量子阱红外探测器在斜入射条件下的光电流谱,斜入射条件分为入射面垂直于器件长轴和平行于器件长轴两种情形。从实验和理论上研究了金属腔共振模对入射角度的依赖性。实验结果表明:入射面垂直于器件长轴时,腔模共振波长不随入射角度变化;入射面平行于器件长轴时,腔模共振波长随入射角度变大而向短波移动。测试结果和推导出的共振波长与入射角度的关系式所计算的结果符合的很好。同时也对比、分析了Fabry-Pérot滤光器和等离激元滤光器的透射峰值波长与入射角度的关系,结果表明金属腔量子阱红外探测器具有相对较好的角度稳健性,并且利用三维金属腔的限制作用有望开发出响应波长对入射角度完全不敏感的量子阱红外探测器。

The photocurrent spectra of metallic cavity quantum well infrared photodetectors under oblique incidence have been measured with incident plane being perpendicular to or parallel to the long axis of the device.The dependence of the resonant mode of the metallic cavity on the incident angle is investigated experimentally and theoretically.The ex‐perimental results show that the resonant wavelength of the cavity mode does not change with the incident angle when the incident plane is perpendicular to the long axis of the device,while it moves to shorter wavelength with the increase of the incident angle when the incident plane is parallel to the long axis of the device.The measured results are in good agreement with the calculated results of the derived formula which describes the relationship of the resonant wavelength and the incident angle.The angle dependences of the Fabry-Pérot filter and the plasmonic filter are also analyzed and compared.The results show that the metal cavity quantum well infrared detector has relatively good angle robustness,and it is expected to develop a quantum well infrared photodetector whose response wavelength is completely insensitive to the incident angle by using three-dimensional metal cavity.