基于MEMS工艺的爆炸箔芯片与高压开关研究现状

Research Status of Exploding Foil Initiator Chip and High Voltage Switch Based on MEMS Technology

爆炸箔起爆器作为新型高安全性和高可靠性火工品,可广泛应用于武器系统的点火起爆、飞行器以及航天器的作动分离等诸多技术领域。从火工品的集成化、小型化以及低成本的发展趋势出发,介绍了南京理工大学微纳含能器件工信部重点实验室基于薄膜集成工艺、低温共烧陶瓷工艺以及印制电路板工艺开展的关于MEMS爆炸箔芯片和高压开关的研究现状。从设计、制备、发火性能、成本等方面分析和对比了各自的特点。最后介绍了爆炸箔芯片在超压起爆以及爆电耦合等新技术领域的研究进展。

As a new type of high safety and high reliability pyrotechnic device,the exploding foil initiator can be widely used in many technical fields such as the ignition and detonation of weapon systems,the actuation separation of aircraft and spacecraft.Starting from the development trend of pyrotechnics integration,miniaturization and low cost,the research status of MEMS explosive foil initiator chip and high voltage switch is introduced based on thin film integration process,low temperature co-fired ceramic process and printed circuit board process.The respective characteristics are analyzed and compared from the aspects of design,preparation,firing performance,and cost.Finally,the research progress of exploding foil initiator chips in new fields such as overpressure initiation,electric explosion and plasma discharge coupling are introduced.