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First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer 被引量:1

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摘要 Currently,the preparation of large-size and high-quality hexagonal boron nitride is still an urgent problem.In this study,we investigated the growth and diffusion of boron and nitrogen atoms on the sapphire/h-BN buffer layer by first-principles calculations based on density functional theory.The surface of the single buffer layer provides several metastable adsorption sites for free B and N atoms due to exothermic reaction.The adsorption sites at the ideal growth point for B atoms have the lowest adsorption energy,but the N atoms are easily trapped by the N atoms on the surface to form N-N bonds.With the increasing buffer layers,the adsorption process of free atoms on the surface changes from exothermic to endothermic.The diffusion rate of B atoms is much higher than that of the N atoms thus the B atoms play a major role in the formation of B-N bonds.The introduction of buffer layers can effectively shield the negative effect of sapphire on the formation of B-N bonds.This makes the crystal growth on the buffer layer tends to two-dimensional growth,beneficial to the uniform distribution of B and N atoms.These findings provide an effective reference for the h-BN growth.
出处 《Journal of Semiconductors》 EI CAS CSCD 2021年第8期66-72,共7页 半导体学报(英文版)
基金 partly supported by the National Natural Science Foundation of China(61874007,12074028) the Beijing Municipal Natural Science Foundation(4182046) Shandong Provincial Major Scientific and Technological Innovation Project(2019JZZY010209) Key-area research and the development program of Guangdong Province(2020B010172001) the Fundamental Research Funds for the Central Universities(buctrc201802,buctrc201830,buctrc202127)。
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