硅材料表面减摩抗磨改性研究现状与展望

Research Status and Prospect of Anti-Friction and Anti-Wear Modification of Silicon Material Surface

近年来,微机电系统(MEMS)发展迅猛,但系统中可发生相对运动的微构件之间的摩擦磨损问题未能得到很好地解决,限制了其进一步的广泛应用和深入发展。主要对固体薄膜润滑、分子超薄膜润滑、离子注入、微织构及石墨烯膜层表面改性方法在微机电系统减摩抗磨方面的研究现状和进展进行了归纳总结,指出应当继续深化硅材料复合表面改性技术及改性层摩擦行为的研究,加强对新型复合表面改性技术的创新和探索。本研究对于拓展MEMS的使用寿命研究具有一定的借鉴意义。

In recent years,micro-electro-mechanical system(MEMS)has been developed rapidly,but the problem of friction and wear between micro-components in which relative motion occurs in the system has not been well resolved,limiting its further widespread application and in-depth development.In this paper,the research status and progress of solid film lubrication,molecular ultra-thin film lubrication,ion implantation,micro texture and graphene film surface modification in anti-friction and anti-wear of MEMS were mainly summarized.It was pointed out that the research on the silicon composite surface modification technology and the friction behavior of modified layer should continue to be deepened,and the innovation and exploration of the new composite surface modification technology should be strengthened.This work could have certain reference significance for the study of extending the service life of MEMS.