圆形热电堆红外探测器的结构优化与仿真分析

Circular thermopile infrared detector structure optimization and simulation analysis

为了研究采用热电堆原理制作的红外探测器输出电压与关键结构尺寸之间的影响关系,获得高输出电压,提出一种基于圆形结构的微机电系统(MEMS)热电堆红外探测器,以红外探测器结构尺寸1.8 mm×1.8 mm×0.35 mm,空腔尺寸Ф1.2 mm为建模仿真的研究基础,对红外探测器进行建模,通过改变吸收层覆盖面尺寸、热偶条对数、冷端长度、有无刻蚀规则孔等关键结构尺寸参数,对红外探测器进行热电仿真和热路径分析,最终确定最优红外探测器仿真结果,仿真结果表明,通过改变热电堆红外探测器关键结构尺寸参数,使得设计的红外探测器输出电压值达到125.08μV,与传统四端梁结构比较,极大地提高了红外探测器的输出电压。

In order to study the influence relationship between the output voltage of the infrared detector made by the thermopile principle and the key structure size, to obtain a high output voltage, a microelectromechanical system(MEMS) thermopile infrared detector based on circular structure was proposed. The size of the infrared detector is 1.8 mm×1.8 mm×0.35 mm and the cavity size was 1.2 mm as the research basis of modeling and simulation. Modeling the infrared detectors, by changing the absorption layer coverage length, thermocouple logarithm, the cold end, presence of etching rules hole size parameters of the key structure, such as the infrared detector thermoelectric heat simulation and path analysis, ultimately determine the optimal infrared detector simulation results, the simulation results show that by changing the thermopile infrared detector size parameters of the key structure. The output voltage of the designed infrared detector is up to 125.08 μV, which greatly improves the output voltage of the external infrared detector compared with the traditional four-terminal beam structure.