黑磷纳机电谐振器的栅极响应有限元分析

Finite element analysis of gate response of black phosphorous nanoelectromechanical resonator

纳机电系统因其体积小、批量制造、高可靠性和低功耗等性能得到了广泛的关注与开展,其中,纳机电谐振器因具有高频、高可调谐性而显示出了巨大的应用前景。利用有限元分析法(FEM),对基于黑磷材料的纳机电谐振器的栅极可调谐性进行了详细的研究,通过改变黑磷的内置张力、吸附物的质量、厚度、空腔深度以及固定边的方向,探究了其对谐振器的谐振频率与可调谐性的影响。结果表明,谐振频率是由栅极电压引起的静电驱动力来调节,当黑磷的内置张力与表面的吸附物质量越小,谐振器的可调谐性越好,但是,对于高频范围的谐振器,内置张力不可过小。固定边方向沿锯齿形(zigzag)相比于沿扶手椅形(armchair)将获得更高的谐振频率与调谐范围。

Nanoelectromechanical systems have received extensive attention and development due to their small size, mass manufacturing, high reliability and low power consumption. Among them, nanoelectromechanical resonators have shown great applications due to their high frequency and high tunability. prospect.In this paper, the finite element(FEM) analysis method is used to conduct a detailed study on the gate tunability of the nanoelectromechanical resonator based on black phosphorous material. By changing the built-in tension of the black phosphorous material, the mass, thickness and cavity depth of the adsorbent As well as the direction of the fixed side, we explored its influence on the resonant frequency and tunability of the resonator.The results show that the resonance frequency is adjusted by the electrostatic driving force caused by the gate voltage. When the built-in tension of the black phosphorus and the amount of adsorbed material on the surface are smaller, the tunability of the resonator is better. However, for resonance in the high frequency range The built-in tension cannot be too small.The direction of the fixed side along the zigzag will obtain a higher resonance frequency and tuning range than along the armchair.