摘要
为提高一维位置敏感器PSD激光微位移测量的精度和稳定性,设计位移测量试验系统。系统采用PSD作为位移检测传感器,使用OPA211低噪运算放大器设计电流转电压(I/V)信号调理电路,以单片机STM32F103为控制器,控制步进电机滑台移动激光光源,采用ADS1256采集位移信号,实现自动位移及位移测量系统。试验测量结果表明,该系统在0~14 mm范围内具有较好的线性,位移测量误差小,测量误差不超过±20μm。
In order to improve the accuracy and stability of one-dimensional position sensor detector(PSD) laser micro displacement measurement, a displacement measurement experiment system is designed. The system uses PSD as the displacement detection sensor. The current to voltage(I/V) signal conditioning circuit is designed with OPA211 low noise operational amplifier. The single chip microcomputer STM32 F103 is used as the controller to control the moving laser light source by the stepping motor slide, and the ADS1256 is used to collect displacement signal. The automatic displacement and displacement measurement system is realized. The experimental results show that the system has a good linearity in the range of 0-14 mm, the displacement measurement error is small, and the measurement error dose not exceed ±20 μm.
作者
秦伟
李娟
张昌明
Qin Wei;Li Juan;Zhang Changming(School of Physics and Telecommunication Engineering Department,Shaanxi University of Technology,Hanzhong,Shaanxi 723000,China;School of Electrical Engineering Department,Shaanxi University of Technology,Hanzhong,Shaanxi 723000,China;School of Mechanical Engineering department,Shaanxi University of Technology,Hanzhong,Shaanxi 723000,China)
出处
《应用激光》
CSCD
北大核心
2021年第3期614-618,共5页
Applied Laser
基金
2018年度陕西省教育厅科研计划项目(18JK0143)
陕西理工大学科研基金项目(SLG1820)
2020陕西省大学生创新创业训练计划项目(S202010720067)。
