55CIS技术平台的N型STI隔离电阻测试研究

Study on N-type STI Isolation Resistance Testing of 55CIS Technology Platform

阐述晶圆可接受测试(WAT)是晶圆代工厂在出货前的一道重要工序。WAT测试结果的精准度决定着晶圆片能否顺利出货。因此,WAT工程师的一项重要工作是提高WAT测试的精确度以及减少测试问题。探讨chuck载物台以及信号线对于测试电阻及其他参数的影响,提出一种提高测试仪器精确度以及测试系统的评估方法。

This paper expounds that wafer acceptance test(WAT)is an important process before shipment in wafer foundry.The accuracy of wat test results determines whether wafers can be shipped smoothly.Therefore,an important work of wat engineers is to improve the accuracy of wat testing and reduce testing problems.It discusses the influence of chuck stage and signal line on test resistance and other parameters,and puts forward an evaluation method to improve the accuracy of test instrument and test system.