圆盘多环内双梁谐振陀螺的结构设计和制备方法

Structure Design and Preparation Method of Disc Multi-ring Resonator Gyroscope with Inner Double-beams

多环陀螺由于其对称性好、机械性能优异、能耗低、效率高等特点成为MEMS陀螺领域高性能惯性器件的代表。基于MEMS多环陀螺的发展现状,针对现有多环陀螺结构刚度较大、灵敏度较低的现状,提出了一种新型的圆盘多环内双梁孤立圆环谐振陀螺,通过内双梁的柔性降低了结构刚度,提高了谐振器的灵敏度。对多环谐振陀螺的主要结构进行了详细设计,对多环陀螺的振动模态进行了有限元分析。同时,提出了基于绝缘体上硅(Silicon on Insulator, SOI)工艺和基于阳极键合工艺的两种制备工艺,进行了工艺流程的设计。

Multi-ring gyroscope has become a representative of high-performance devices in the field of MEMS gyroscopes due to its good symmetry, excellent mechanical properties, low energy consumption, and high efficiency. Based on the development status of MEMS multi-ring gyroscope, a new type of disc multi-ring inner double-beams resonant gyroscope is proposed for the current situation of the existing multi-ring gyroscope with greater rigidity and lower sensitivity. The flexibility of the inner double beams reduces the structural rigidity and improves the sensitivity of the resonator. The main structure of the multi-ring resonant gyroscope is designed in detail, and the vibration modal of the multi-ring gyroscope is analyzed by finite element method. At the same time, two preparation processes based on SOI process and anode bonding process are proposed, and the process flow is designed.