摘要
基于某集成电路制造企业的厂务冰水系统阀门老化的案例,阐述运用全面质量管理理论(五要素分析法),分析影响阀门老化的因素及对应的预防措施。
Based on the case of valve aging of factory ice water system in an integrated circuit manufacturing enterprise,this paper expounds the factors affecting valve aging and corresponding preventive measures by using total quality management theory(five factor analysis method).
作者
白新明
彭博
郭静涛
BAI Xinming;PENG Bo;GUO Jingtao(Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd.,Hubei 430223,China)
出处
《集成电路应用》
2021年第9期20-22,共3页
Application of IC
关键词
集成电路制造
失效分析
厂务冰水
integrated circuit manufacturing
failure analysis
factory affairs
ice water