基于柔性衬底的双端固支梁RF MEMS开关相位特性研究

Phase Characteristics Research on the Double-Clamped Beam RF MEMS Switch Based on Flexible Substrate

本文针对衬底弯曲对柔性RF MEMS开关相位特性的影响,提出了一种基于LCP柔性衬底的双端固支梁RF MEMS开关相位特性模型,并从软件仿真和实验验证方面对不同曲率条件下开关的相位偏移进行了深入研究,揭示了柔性衬底弯曲对相位偏移量的影响规律。实验结果表明,当柔性衬底弯曲曲率从0增大到28.6 m^(-1)时,RF MEMS开关的相位偏移量绝对值不断增大,中心频率10 GHz处相位偏移由0°变化到-2.72°,8 GHz~12 GHz频率范围内实测值和仿真值误差小于9.5%,实测值和模型计算值误差小于10.9%,三者显现出良好的一致性。

Aiming at the influence of substrate bending on the phase characteristics of RF MEMS flexible switch, a model of the RF MEMS double-clamped beam switch based on LCP flexible substrate is proposed in this paper. Also, further study has been done on the simulated and experimental validation of phase shift of the switch, which has revealed the influence of substrate bending to the phase shift. When the flexible substrate bending curvature increases from 0 to 28.6 m^(-1),experimental results show that the absolute value of phase shift of RF MEMS switch exhibits a tendency of increase. The phase shift varies from 0 ° to-2.72 ° at the frequency of 10 GHz. The error between the simulated and measured value is less than 9.5% and the error between the calculated and measured value is less than 10.9% at 8~12 GHz, which shows a good consistency among them.