化学气相沉积法合成金刚石的研究进展

Research Progress in Synthesis of Diamond Prepared with Chemical Vapour Deposition(CVD)

为了更深入地了解化学气相沉积法合成金刚石,对化学气相沉积法合成金刚石的主要类型、合成的金刚石结构及主要形态和主要应用领域进行了综述。化学气相沉积法合成金刚石的方法可分为微波等离子体化学气相沉积法、热丝化学气相沉积法和直流电弧等离子体喷射化学气相沉积法。化学气相沉积法合成的金刚石的形态主要有金刚石单晶、微纳米级多晶金刚石膜和类金刚石膜。该法合成的金刚石主要用作钻石培育、刀具涂层、半导体器件材料、水处理电极材料以及其他功能材料。由于该合成金刚石在质量、尺寸、净度、功能等方面的众多优势,预计在未来几十年内,在产量上快速赶上高压高温法,在质量上超过高压高温法。为了加快化学气相沉积法合成金刚石的发展,应该从提高速率、提升质量、加大尺寸、细化功能四个方面深入开展化学气相沉积法合成金刚石的技术研发。

In order to further understand the synthesis of diamond with chemical vapour deposition(CVD),synthesis process,structural and morphologic development and applications were summarized in this article.There are various chemical vapour deposition approaches,including microwave plasma chemical vapour deposition,hot filament chemical vapour deposition,direct current arc plasma jet chemical vapour deposition and so on.The resultant diamonds include crystalline diamond,micro/nano-crystalline diamond coatings and diamond-like films.The diamonds synthesized with chemical vapour deposition have mainly been used as cultivating diamonds,tool coating,semiconductor device materials,electrode material for water treatment and other functional materials.Due to the superiority in quality,size,clarity and function of diamond synthesis by chemical vapor deposition,chemical vapour deposition process is expected to the high pressure and high temperature methods to produce diamonds with similar or higher performances in the coming decades.In this regard,it is necessary to increase the production rate,enhance the product quality,enlarge the size and enrich the functions,so as to accelerate the development of chemical vapor deposition for the synthesis of diamonds.