基于数字全息的玻璃微加工形貌测量

Morphology Measurement of Glass Micromachining Based on Digital Holography

利用数字全息显微技术对玻璃微加工中微结构的形貌进行了高精度测量,基于马赫-曾德离轴显微干涉系统记录微结构的数字全息图,用混合重建算法和行列扫描法解包裹提取高精度的相位分布,进而构建微结构的形貌,并计算了深度。对平凸球形微透镜进行了形貌仿真与测量,验证了该方法的可行性。用二氧化碳激光器对载玻片表面进行光刻微加工,定量分析了不同光刻参数对玻璃微结构的形貌及深度的影响,以及加工热影响区引起的重凝高度对加工质量的影响。结果表明,光刻深度随着激光功率的增大而增大,随着打标速度的减小而增大,Q频较小时深度较大。这有助于指导玻璃的精细加工。

The morphology of microstructure in glass micromachining is measured with high precision by digital holographic microscopy.The digital hologram of microstructure is recorded based on the Mach-Zehnder off-axis micro-interference system.The high-precision phase distribution is extracted by hybrid reconstruction algorithm and row-column scanning unwrapping.Then the morphology of microstructure is constructed and the depth is calculated.The morphology of flat,convex spherical microlen is simulated and measured,which verifies feasibility of the method.The surface of the glass slide is micro-machined with a carbon dioxide laser,the effects of different lithography parameters on the morphology and depth of glass microstructure is quantitatively analyzed.And the influence of the recondensed height caused by the processing heat affected zone on the processing quality is analyzed.The results show that the lithography depth increases with the increase of laser power and increases with the decrease of marking speed,and the depth is larger when the Q frequency is smaller.This helps guide the fine processing of the glass.