A thin-film temperature sensor based on a flexible electrode and substrate

Accurate temperature measurements can efficiently solve numerous critical problems and provide key information.Herein,a flexible micro-three-dimensional sensor,with a combination of platinum and indium oxide to form thermocouples,is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements.The stability and reliability of the sensor are greatly improved by optimizing the process parameters,structural design,and preparation methods.A novel micro-three-dimensional structure with better malleability is designed,which also takes advantage of the fast response of a two-dimensional thin film.The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields,including bio-robot and healthcare systems.The model of the application sensor in a mask is further proposed and designed to realize the collection of health information,reducing the number of deaths caused by the lack of timely detection and treatment of patients.