基于激光泰曼干涉仪的角锥反射镜误差测量

Error Measurement of Hollow Corner Cube Reflector Based on Laser Twyman Interferometer

推导了干涉法测量角锥反射镜的综合偏差与其二面角误差之间的关系,总结了干涉法测量角锥反射镜干涉图的特征与判读规则,并搭建激光泰曼-格林干涉仪对待测角锥反射镜进行了实测分析。实验结果表明,该理论方法和激光泰曼-格林干涉仪能够实现角锥反射镜二面角误差小于1″的精确测量。

The relationship between the comprehensive deviation and dihedral angle error of the hollow corner cube reflector measured by interferometry is derived. The characteristics and interpretation rules of the interference pattern of the hollow corner cube reflector are summarized. A laser Twyman-Green interferometer is built to measure and analyze the angle error of a hollow corner cube reflector. Experimental results show that the accurate measurement of the angle error less than 1″ of the reflector can be realized by the theoretical method and laser TwymanGreen interferometer.