基于气浮导轨的光栅尺动态检测系统设计与误差分析

Design and Error Analysis of Dynamic Detection System of Grating Rulers Based on Air-bearing Guideway

光栅尺的动态精度受到安装误差、温度、振动等环境因素影响,目前光栅尺常采用的静态检测方法并不能满足光栅尺动态运行要求。另外,对于大行程、高精度光栅尺,传统检测系统中用到的滚珠丝杠机构的结构形变会引起较大的阿贝误差,无法满足检测精度要求。针对以上问题,提出了基于速度和加速度等动态变量的光栅尺动态精度检测方法,并以外差激光干涉仪为长度基准,以误差最小化为目标,设计并优化了基于精密气浮导轨的光栅尺动态误差检测系统,对检测系统的综合误差进行了分析。结果表明,所设计的动态精度检测系统可以满足大量程高精度光栅尺动态精度检测的要求。

Dynamic precision of the grating ruler is affected by environmental factors, including installation error, temperature and vibration. The detection method of grating ruler at present is mostly static detection, which can not meet the requirements of the dynamic operation of the grating ruler. In addition, the structural deformation of ball screw or other mechanisms used in the traditional detection system will cause a large abbe error, which can not meet the requirements of detection accuracy for the large-range grating ruler. In view of the above problems, a dynamic accuracy detection method for grating ruler based on dynamic variables such as velocity and acceleration was proposed in this study. And a dynamic error detection system of grating ruler based on precision air-bearing guideway was designed and optimized to minimize the detection error, a laser interferometer was used as the length reference. And the comprehensive error of the testing system was analyzed. The results show that the designed dynamic precision testing system can meet the requirements of the dynamic precision testing of large-range and high-precision grating ruler.