非离子型Gemini表面活性剂研究进展及其在半导体湿电子材料中的应用

Research progress of non-ionic gemini surfactants and their application in semiconductor wet chemicals

非离子型双子(Gemini)表面活性剂具备优异的表面活性和独特的分子结构,且不会引入金属离子杂质,在集成电路领域具有巨大的应用潜力。通过对Gemini非离子表面活性剂的部分基团的进行改性,能够显著提高其各项性能,应用于湿电子材料后能够匹配集成电路领域的高精细化发展要求。

Nonionic Gemini surfactants have great application potential in the integrated circuit manufacturing,due to their excellent surface activity and unique molecular structure without introducing metal ions.Their properties can be significantly improved by modificatios of some groups.Such modification can match the high-precision requirements of integrated circuit manufacturing with their applications to wet electronic materials.