可自动消除NG竖线缺陷的Mura检测机设计探究

Research on the Design of Mura Testing Machine for Automatically Eliminating NG Vertical Bar Defects

目前TFT-LCD行业CF基板的宏观缺陷出现后是无法修补的,当缺陷的特定值超过Spec,Glass上相应的Panel就会被判为Panel NG。每天会有很多Panel因为宏观品质NG掉。而所有的宏观缺陷中,竖线Mura所占到的比率最高。文章提出一种可消除NG竖线的Mura检测机的设计探究。新型的Mura检测机可通过新设计的“探针单元”确定竖线区域膜厚的高低,再利用“竖线处理单元”对竖线进行处理,并根据“图像对比单元”的数据对比进行结果确认或再修改,快速将此竖线的特性值处理为Spec内,使得此缺陷不会导致Panel NG。这就使得CF基板的OK比率有了大幅度的提高,为公司节约了大量的成本,更重要的是实现了CF基板宏观缺陷的修补。

At present,the macro defects of the CF substrate in the TFT-LCD industry can not be repaired.When the specific value of the defect exceeds the corresponding the Spec,the Panel onGlasswill be judged as Panel NG.Every day,there will be a lot of Panel lost because of the macro quality NG.Among all the macro defects,the vertical bar Mura accounts for the highest proportion.This paper presents the design of a Mura testing machine which can eliminate the NGvertical bar.The new Mura testing machine can determine the film thickness of the vertical line area through the newly designed"probe unit",then,using the"vertical bar processing unit"the vertical bar isto be processed,to confirm or modify the results according to the data comparison of the"image comparison unit",and quickly process the characteristic value of the vertical bar within Spec,so that this defect will not lead to Panel NG.As a result,the OK ratio of CF substrate has been greatly improved,which saves a lot of cost for the company,and,more importantly,realizes the repair of macroscopic defects of CF substrate.