显微拉曼成像技术在钽酸锂晶体的成分、缺陷和应力分布表征中的应用研究

Study on application of Raman mapping technology in characterization of composition,defects and stress distribution of lithium tantalate crystal

采用激光共聚焦显微拉曼光谱仪分别对钽酸锂晶体进行了显微拉曼成像测试研究,以865 cm^(-1)特征峰峰强度对钽酸锂的成分分布进行了显微拉曼成像;以865 cm^(-1)特征峰半高宽对晶体中锂含量分布进行了显微拉曼成像;以750 cm^(-1)缺陷峰强度对晶体中的本征缺陷分布进行了显微拉曼成像;以865 cm^(-1)特征峰峰位置对晶体中的应力分布进行了显微拉曼成像。测试结果表明,显微拉曼成像可以很好地对钽酸锂单晶片的化学成分和组分、本征缺陷、应力等化学物理性质的微观分布进行成像,未掺杂三氧化二铁比掺杂了三氧化二铁的钽酸锂晶体的成分和锂含量分布更加均匀,未掺杂三氧化二铁和掺杂了三氧化二铁的钽酸锂晶体的本征缺陷分布皆比较均匀且很少,未掺杂三氧化二铁比掺杂了三氧化二铁的钽酸锂晶体的应力分布更加均匀,掺杂了三氧化二铁的钽酸锂晶体存在明显的应力分布集中的区域。

The Raman mapping test of lithium tantalate crystal was studied by laser raman microscopy spectrometer.The composition distribution of lithium tantalate crystal was imaged by Raman mapping in the characteristic peak intensity of 865 cm^(-1).The Li content distribution of crystal was imaged by Raman mapping in the characteristic peak FWHM of 865 cm^(-1).The defects distribution of crystal was imaged by Raman mapping in the defects peak intensity of 750 cm^(-1).The stress distribution of crystal was imaged by Raman mapping in the characteristic peak position of 865 cm^(-1).The test results showed the composition,defects and stress distribution of lithium tantalate single crystal sheet could be well imaged by Raman mapping.The composition and Li content distribution of undoped lithium tantalate crystal were more uniform than that doped with Fe2O3.The distribution of intrinsic defects in undoped and doped lithium tantalate crystals with Fe2O3 was both relatively uniform and few.The stress distribution of undoped lithium tantalate crystal was more uniform than that doped with Fe2O3.There was an obvious stress concentration region in lithium tantalate crystal doped with Fe2O3.