高精度柔性玻璃平面度及表面缺陷测量仪

High-Precision Flexible Glass Flatness and Surface Defect Gauge

针对柔性玻璃的材料特殊性,本文设计了一种基于高精度白光共聚焦高度测量仪的平面度和瑕疵检测设备。该设备可对生产线上柔性玻璃平面度及表面凹坑、突起和波浪纹等瑕疵进行检测,及早发现柔性玻璃生产过程中的缺陷,提高产品良品率。该设备通过白光共聚焦高度测量仪和高精度xy平台,移动采集玻璃表面三维高度坐标进行玻璃表面平面度分析和对表面凹坑、突起和波浪等瑕疵进行检测。用户可通过拟合的三维热度点云图准确地找到玻璃表面凹坑、突起和波浪等瑕疵,提高产品的良品率。本文就此问题加以阐述。

Aiming at the material particularity of flexible glass,this article designs a flatness and flaw detection equipment based on a high-precision white light confocal height gauge.This equipment can detect the flatness of flexible glass on the production line and defects such as surface pits,protrusions and wavy lines,early detect defects in the flexible glass production process,and improve product yield.The equipment uses a white light confocal height gauge and a high-precision xy platform,to dynamically collect the three-dimensional height coordinates of the glass surface,to analyze the glass surface flatness and detect defects such as surface pits,protrusions and waves.Users can accurately find defects such as pits,protrusions and waves on the glass surface through the fitted three-dimensional heat point cloud diagram,and improve the yield of products.This article elaborates on this issue.