多种方法改善浸润式光刻机曝光台边缘缺陷检测问题

A variety of methods improved the edge defect detection for the wafer stage of the immersion lithography machine

为有效提升浸润式光刻机的边缘缺陷监控效率,延长关键部件的使用寿命,本文从软件监控方面入手,建立了一套浸润式光刻机边缘缺陷检测监控机制,最终通过有效的管理改善,极大地保证了机台稳定性,提升了产品良率。

In order to effectively improve the monitoring efficiency of edge defects of immersion lithography machine and extend the service life of key components,this paper starts from the aspect of software monitoring and establishes a set of edge defects detection and monitoring mechanism of immersion lithography machine.Finally,through effective management and improvement,the stability of the machine is greatly guaranteed and the product yield is improved.