薄膜型声表面波器件的研究进展

Research Progress of Thin Film SAW Devices

相较于传统的压电单晶声表面波器件,薄膜型声表面波器件具有成本低、易小型化、易集成化等优点。文章对几种薄膜型声表面波器件的研究进展进行了综述。首先,总结了几种常见的薄膜制备方法。然后,根据应用范围的不同将薄膜型声表面波器件分为高频器件和高温器件。根据这两大类型,综述了近年来较典型的五种薄膜型声表面波器件,介绍其制备流程、基本结构和高频/高温等特性。最后,对五种薄膜型声表面波器件进行对比,并对薄膜型声表面波器件的未来发展提出展望。该综述对薄膜型声表面波器件的实际应用及推广具有一定借鉴意义。

Compared with traditional piezoelectric monocrystalline SAW devices, thin film SAW devices have the advantages of low cost, easy miniaturization and easy integration. The research progress of several thin film SAW devices was reviewed in this paper. Firstly, several common thin film preparation methods were summarized. Then thin film SAW devices were divided into high frequency devices and high temperature devices according to different applications. According to the two types, five typical thin film SAW devices in recent years were reviewed, and their fabrication process, basic structure and high frequency/high temperature characteristics were introduced. Finally, these five kinds of thin film SAW devices were compared, and the prospect of the future development of thin film SAW devices was proposed, which had certain guiding significance for the practical application and promotion of thin film SAW devices.