热处理温度对铁镍合金膜层微观结构和镀膜玻璃性能的影响

Effect of Heat Treatment Temperature on Microstructure of Fe-Ni Alloy Film and Properties of Coated Glass

为了研究不同热处理温度下铁镍合金薄膜的形貌结构以及镀膜玻璃的性能,本文采用真空电子束加热蒸发镀膜技术在玻璃基片上镀铁镍合金薄膜,通过多晶X射线衍射(XRD)和场发射扫描电子显微镜(FESEM)分析结构,测试镀膜玻璃的光学性能、电磁性能以及电磁屏蔽性能。结果表明:随着热处理温度的升高,薄膜的结晶性能变好,逐渐析出体心立方晶相,在(110)方向具有择优取向,当热处理温度过高时薄膜中出现孔隙;热处理温度对镀膜玻璃雾度的影响小于1%,但镀膜玻璃的可见光透过率、表面方块电阻和相对磁导率会随热处理温度变化呈现一定规律变化;铁镍合金镀膜玻璃在30 MHz以下的低频电磁波频段内的屏蔽效能大于30 dB,在14 kHz时最高达到55 dB,是一种低频电磁屏蔽的优选材料。

In order to study the morphology of Fe-Ni alloy films and properties of coated glass at different heat treatment temperatures,the Fe-Ni alloy film is deposited on the glass substrate by vacuum electron beam heating evaporation technology.The structure of the film was analyzed by polycrystalline X-ray diffraction(XRD)and field emission scanning electron microscope(FESEM).Then the optical properties,electromagnetic properties,and electromagnetic shielding properties of the coated glass were tested.The results show that as the heat treatment temperature increases,the crystallinity of the films is better,and the body-centered cubic crystal phase gradually precipitates,which has the preferred orientation in(110)direction.Pores appear in the films when the heat treatment temperature is too high.The influence of heat treatment temperature on the haze of the coated glass is less than 1%,but the visible light transmittance,surface sheet resistance,and relative permeability of the coated glass show a certain change with the change of heat treatment temperature.The shielding effectiveness of Fe-Ni alloy coated glass is more than 30 dB in the low-frequency electromagnetic waveband below 30 MHz,and the highest is 55 dB at 14 kHz.It is a preferred material for low-frequency electromagnetic shielding.