摘要
目前洁净室被广泛应用于医疗、电子及食品行业等,本文依据GB50591-2010《洁净室施工及验收规范》,对洁净室检测中的微粒计数浓度测得值进行不确定度评定。通过建立测量模型,进行不确定度来源分析,得出测得值的相对扩展不确定度。
At present,cleanrooms are widely used in medical,electronic and food industries.This paper evaluates the uncertainty of the measurement results of airborne particle count concentration in cleanroom according to GB50591-2010 "Code for Construction and Acceptance of Cleanroom".By establishing the measurement mathematical model and analyzing the source of uncertainty,the relative expanded uncertainty of the measurement results was obtained.
出处
《计量与测试技术》
2021年第9期120-122,共3页
Metrology & Measurement Technique
关键词
洁净室
微粒
不确定度
cleanroom
airborne particle
uncertainty