洁净室微粒计数浓度检测结果不确定度评定

Uncertainty Evaluation of Airborne Particle Count Concentration in Cleanroom

目前洁净室被广泛应用于医疗、电子及食品行业等,本文依据GB50591-2010《洁净室施工及验收规范》,对洁净室检测中的微粒计数浓度测得值进行不确定度评定。通过建立测量模型,进行不确定度来源分析,得出测得值的相对扩展不确定度。

At present,cleanrooms are widely used in medical,electronic and food industries.This paper evaluates the uncertainty of the measurement results of airborne particle count concentration in cleanroom according to GB50591-2010 "Code for Construction and Acceptance of Cleanroom".By establishing the measurement mathematical model and analyzing the source of uncertainty,the relative expanded uncertainty of the measurement results was obtained.