同位素分离领域气体小流量控制方法

Summary of Small Gas Flow Control Methods in The Field of Isotope Separation

在气体同位素分离领域,需要对系统内的气体流量进行精确控制,某些关键位置需要达到0.1 mg/s的精度,才能符合设计要求。为了实现精确控制气体流量的目的,气体流体力学中的“声速孔板”原理在气体同位素分离领域得到了广泛应用。本文在声速孔板物理原理的基础上,介绍几种常用的孔板校准方法,并整理出基本的应用方向,为广大科研人员在实验研究、工程设计等有气体流量控制需求时提供参考。

In the field of gas isotope separation,it is necessary to accurately measure the gas flow in the system.To meet the design requirements,the accuracy of 0.1 mg/s even needs to be achieved at some key positions.In order to control the flow accurately,the principle of“sound velocity orifice plate”in gas hydrodynamics has been widely used in the field of gas isotope separation.Based on the physical principle of sound velocity orifice plate,this paper introduces several commonly used orifice calibration methods,and sorts out the basic application direction,so as to facilitate the majority of scientific researchers to use directly in the process of experimental research and engineering design,etc.