ZnO梁谐振仿真与分析研究

Resonance Simulation and Analysis of ZnO Nanobeam

基于ZnO材料的半导体特性,制备了一款敏感元件为纳米尺度的谐振器。阐明了一维半导体材料静电激励场效应拾振的检测原理,利用COMSOL Mutiphysics耦合仿真分析软件,建立了ZnO谐振梁仿真模型。仿真分析了ZnO梁静电激振参数的对谐振特性的影响,优化得到最佳激振参数:交流0.01 V,沟道深度1.2μm。采用MEMS工艺制备了谐振器基底,利用转移工艺形成了长度50μm,直径550 nm的ZnO谐振梁元件,并通过FIB沉积技术形成欧姆接触。基于混频锁相原理,测量了ZnO谐振梁静电激振场效应拾振的幅频特性,结果表明该谐振梁特征频率为1.018 MHz,与仿真结果吻合。

Based on the semiconductor characteristics of ZnO material,a resonator with nanoscale sensitive element was presented.The detection principle of one-dimensional semiconductor materials with electrostatic driven field-effect pickup was illustrated.The simulation model of ZnO resonance beam was established by using COMSOL Mutiphysics coupling simulation analysis software.The influence of electrostatic excitation parameters on resonance characteristics was analyzed,and the best excitation parameters were optimized i.e.AC 0.01V and channel depth 1.2μm.Furthermore,the resonator substrate was prepared by MEMS technology.Consequently,the ZnO resonant beam with a length of 50μm and a diameter of 500 nm was transferred,in result ohmic contact was formed by FIB deposition technology.On account of the principle of frequency-mixing and phase-locking,the amplitude-frequency characteristics of ZnO resonant beam with electrostatic driven field-effect pickup was measured.The testing result shows that the frequency of the resonant beam is 1.018 MHz,which is good agreement with the simulation results.