双面研磨Si3N4圆柱滚子表面质量研究

Study on surface quality of double-sided grinding SiN cylindrical rollers

为实现Si3N4圆柱滚子表面的精密加工,探究不同研磨工艺参数对试件表面粗糙度的影响规律。用双平面研磨进行单因子试验,通过粗糙度检测仪、扫描电镜对试件表面粗糙度、表面形貌进行分析。使用W5金刚石磨料、质量分数为3%的研磨液、研磨时间为30 min时,试件表面粗糙度为0.043 3μm;而研磨速度为15 r/min时,表面粗糙度最小,为0.035 9μm。双平面研磨中磨料粒度越小,试件表面粗糙度越低;研磨液的浓度、研磨时间、研磨速度对试件表面粗糙度的影响先减后增,合理采用研磨工艺参数,可得到高质量Si3N4圆柱滚子。

In order to achieve precision machining of the surface of Si3N4 cylindrical rollers,the influence of different grinding process parameters on the surface roughness of the specimen was investigated. The surface roughness and surface morphology of the specimen after machining were analyzed by means of roughness detector and scanning electron microscope. When W5 diamond abrasive is used,the grinding solution concentration is 3% and the grinding time is 30 min,the surface roughness of the specimen reaches 0.043 3 μm. When the grinding speed is 15 r/min,the surface roughness reaches the minimum of 0.035 9μm. The smaller the abrasive size is,the lower the surface roughness of the specimen is. The effect of grinding solution concentration,grinding time and grinding speed on the surface roughness of the specimen decreases first and then increases. By using reasonable grinding process parameters,high quality Si3N4 cylindrical rollers can be obtained.