基于多焦点并行加工光栅的研究

Grating Parallel Fabrication Based on the Multifocal Spots

本文提出了一种多焦点并行加工光栅的方法,主要利用矢量迭代优化算法,设计生成了多焦点的纯相位分布图。利用空间光调制器和纯相位分布图,可以将入射光调制成为所需的多焦点阵列。以1×11个点阵结构为例,利用飞秒激光加工系统结合空间光调制器实现了11路激光的并行加工,可以同时制备11条纳米级宽度的光栅结构,验证了矢量迭代优化算法可以产生高均匀度的多焦点,为提高飞秒激光加工效率提供了一种方法,在制备大规模光栅及微纳光学器件方面具有很高的应用价值。

In this paper,a method for parallel fabrication of grating with multiple focal spots was proposed,and phase-only distribution patterns of multiple focal spots were designed and generated by using vector iterative optimization algorithm.The incident light can be modulated into a required multifocal array by using a spatial light modulator and a phase-only hologram.With 1×11 multifocal spots as an example,11-channel laser parallel processing had been realized based on femtosecond laser processing system and spatial light modulator.The grating with nano-scale width can be produced simultaneously with 11 line.The experimental results verify the vector iterative optimization algorithm can be used to produce multifocal spots with high uniformity,which provides a method for improving the processing efficiency of femtosecond laser fabrication.This study can be helpful to the applications in the fields of preparation of large-scale gratings and micro-nano optical devices.