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基于差分光声池结构的高灵敏度一氧化碳气体传感器(特邀) 被引量:5

Highly Sensitive Carbon Monoxide Gas Sensors Based on a Difference Photoacoustic Cell(Invited)
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摘要 搭建了一套高灵敏度的光声一氧化碳气体传感器。采用波长为1566.3 nm的近红外分布式反馈激光器作为激励光源,并利用商用光纤放大器将激光功率泵浦到10 W量级,解决了由于近红外波长区域吸收线强较弱带来的探测灵敏度低等问题。设计了由两个结构完全相同的光声共振腔构成的双通道差分光声池,抑制了由高功率激光引入的窗口噪声。通过优化传感器的激励光功率和工作压强,在50 ppm的CO/N2标准气中,获得的光声信号幅值为1.38 mV,1σ噪声为0.96μV,探测信噪比为1437.5,探测灵敏度为34 ppb,归一化噪声等效系数为1.74×10-8cm-1W/Hz1/2。 A photoacoustic carbon monoxide gas sensor with high sensitivity was demonstrated. A nearinfrared distributed feedback laser laser with a wavelength of 1 566.3 nm was used as the excitation source.A commercial fiber amplifier was employed to pump the laser power to 10 W level,which solved the problem of low detection sensitivity due to the weak absorption in the near-infrared wavelength region. A dual channel differential photoacoustic cell with the same structure was designed to reduce the window noise caused by high power laser. By optimizing the excitation light power and working pressure of the sensor system,a signal amplitude of 1.38 mV,a noise(1σ)of 0.96 μV,a detection signal to noise ratio of 1 437.5,the detection sensitivity of 34 ppb,and a normalized noise equivalent coefficient of 1.74×10-8 cm-1 W/Hz1/2 were obtained.
作者 尹旭坤 高苗 苗瑞琪 苏永亮 章学仕 张乐 刘丽娴 邵晓鹏 YIN Xukun;GAO Miao;MIAO Ruiqi;SU Yongliang;ZHANG Xueshi;ZHANG Le;LIU Lixian;SHAO Xiaopeng(School of Physics and Optoelectronic Engineering,Xidian University,Xi'an 710071,China)
出处 《光子学报》 EI CAS CSCD 北大核心 2021年第10期156-162,共7页 Acta Photonica Sinica
基金 国家自然科学基金(Nos.61975254,61805187) 广东省基础与应用基础研究基金(No.2020A1515111012)。
关键词 光声光谱 红外光谱 声学谐振腔 结构设计 一氧化碳 气体传感器 Photoacoustic spectroscopy Infrared spectroscopy Acoustic resonators Stroctural design Carbon monoxide Optical gas sensors
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