摘要
设计了一种用于LD耦合透镜焦斑位置检测的显微图像视觉成像系统,该系统由远心镜头、环形LED光源、工业用数码相机和前进运动控制器组成。分别对模组外圆直径与中心检测和对LD耦合透镜出射LD激光焦斑中心和位置检测,得到耦合透镜的焦距及LD偏心度,为后续与光纤的耦合提供精确定位。实验数据表明,该系统偏心测量标准差小于5μm,焦距测量标准差小于±0.1 mm,能准确获得聚焦光斑和底座圆心的相对位置关系,实验结果精确、测量效率高。
A microscopic image vision imaging system composed of a telecentric lens,a ring LED light source,an industrial digital camera and a stepping motion controller is designed to be used for LD coupling lens focal spot detection.The diameter and center of the outer circle of the module,and the center and position of the LD laser focal spot emitted by the LD coupling lens are detected. The focal length of the coupling lens and the eccentricity of the LD are obtained to provide precise positioning for subsequent coupling with the optical fiber. The experimental data show that the standard deviation of the eccentricity measurement of the system is less than 5 μm,and the standard deviation of the focal length measurement is less than ±0.1 mm. The relative position relationship between the focused spot and the base circle center can be accurately obtained. The experimental results are accurate and the measurement efficiency is high.
作者
李馨
程锦
何平安
LI Xin;CHENG Jin;HE Ping-an(School of Electronic Information,Wuhan University,Wuhan 430072,China)
出处
《光学与光电技术》
2021年第4期18-23,共6页
Optics & Optoelectronic Technology
关键词
视觉测量
耦合透镜
偏心测量
焦距测量
搜索算法
vision measurement
coupling lens
eccentricity measurement
focal length measurement
search algorithm