单相对称型压电驱动器的振动特性分析与研究

Finite Element Analysis and Research of Single-Mode Piezoelectric Actuator

为解决双相压电驱动器对频率一致性要求高,以及单相驱动器不易实现双向运动、正反向性能不一致等问题,提出一种单模态驱动且双向运动一致的压电驱动器。该驱动器采用带方孔的对称型结构作为定子部分,并在其中心块两侧黏结沿厚度极化的压电陶瓷,通过给一侧的压电叠堆陶瓷施加电压信号来激发驱动足的法向和切向运动,从而形成扁平的椭圆运动轨迹。而驱动器的双向运动将通过轮换激发两侧的压电叠堆陶瓷来实现。为研究驱动器的驱动机理,建立了定子的有限元模型,采用有限元分析方法对其进行模态、瞬态分析,从而对其振动特性进行分析。然后根据仿真结果加工制造了样机,进行了机械特性实验,从而对其输出性能进行测试和讨论。

In order to solve the problem that the two-mode ultrasonic motor has high requirements on modal frequency consistency,and the single-mode ultrasonic motor is not easy to realize two-way movement and the performance of the two-mode ultrasonic motor is inconsistent,a linear ultrasonic motor with single-mode driving and consistent two-way movement is proposed.The motor adopts the symmetrical structure with square hole as the stator part,and bonds the piezoelectric ceramics polarized along the thickness on both sides of its central block.The normal and tangential modes of the driving foot are excited by inputting a singlephase driving signal to one side of the piezoelectric piece,so as to form a flat elliptical motion track.The bidirectional motion of the motor will be achieved by rotating the piezoelectric plates on both sides.The finite element model of the stator is established in order to study the driving mechanism of the motor.And the modal,harmonic response and transient analysis of the stator are carried out by the finite element analysis method,so as to analyze the working mode and the motion trajectory of the driving foot.