基于SR机构的微位移平台的设计及有限元分析

文章设计了压电式二维微位移平台,能够实现x、y方向的微位移,每个方向都有一个Scott-Russell机构(简称为SR机构)来放大压电驱动器的输出位移,该机构的理论放大倍数为3.125。用SolidWorks软件中的simulation模块进行有限元分析,结果表明:机构的实际放大倍数为2.23,微位移平台能够实现的最大位移为66μm。

In this paper,a piezoelectric two-dimensional micro displacement platform is designed,which can realize micro displacement in different directions with a Scott Russell mechanism to amplify the output displacement of the piezoelectric actuator.The theoretical magnification of the mechanism is 3.125.The simulation module of SolidWorks software is used for finite element analysis and the analysis results show that the actual magnification of the mechanism is 2.23,and the maximum displacement of the micro displacement platform is 66μm.