制冷器件晶粒相邻面准共焦成像检测的光学装置

An optical apparatus for inspecting adjacent surfaces defects of TEC components with quasi-confocal imaging system

提出了一种半导体制冷器件晶粒相邻面同时准共焦成像检测的光学装置。选择晶粒天面成像光路中直角反射转像棱镜到玻璃载物转盘之间的距离调节来实现双面准共焦成像。设计了晶粒相邻面缺陷同时准共焦成像检测的光学系统,完成了晶粒相邻面缺陷同时准共焦成像检测的实验验证。结果表明,该检测装置可以实现晶粒相邻面缺陷同时成像检测的功能,满足晶粒相邻面缺陷成像检测的性能要求。具有提高检测速度、简化结构且提高系统可靠性等优点,可在晶粒缺陷智能检测筛选系统中获得应用。

An optical apparatus with quasi-confocal imaging has been proposed for simultaneously inspecting adjacent surfaces defects of thermoelectric cooler(TEC)components.The quasi-confocal imaging can be obtained by choosing the separation between the right-angle reflection prism and the the glass plate.The optical apparatus for defects inspection has been designed and experimental investigations on surfaces defects inspection have been conducted.The results showed that the proposed optical apparatus allows one to simultaneously inspect the defects of adjacent surfaces of TEC components with carefully selected tele-centric imaging lens with sufficient depth of focus.It was concluded that the optical apparatus can meet the technical requirements for inspecting adjacent surfaces defects of TEC components.The apparatus has advantages of increased inspection speed,simplified system configuration and improved equipment reliability etc.It will be found applications in the intelligent defects inspection system of TEC components.