基于工艺控制与基体处理的类金刚石涂层性能优化技术研究综述

Review on Optimization Technology of Diamond-like Carbon Coating Based on Process Control and Substrate Treatment

类金刚石涂层(DLC)因其高硬度、高耐磨性、低摩擦因数等特性被广泛用作机械零部件润滑防护涂层,但传统的DLC涂层在高速、重载及高温等苛刻工况下易发生摩擦因数升高、开裂及鼓包/起皮并从基材脱落进而导致涂层润滑防护失效。基于工艺控制及基体处理2个方面,从涂层的沉积工艺、元素掺杂、过渡层的添加及渗氮渗碳、改变粗糙度、加工表面微织构等手段对提升DLC涂层服役性能的优化措施进行综述;针对提高DLC涂层服役性能的措施进行理论分析,并提出未来的研究方向,如建立规范统一的高性能DLC涂层的制备工艺及性能表征方法,进一步探讨不同基体粗糙度对涂层机械啮合力的影响,以及微织构的尺寸效应及对DLC涂层的热应力缓释作用。

Diamond like carbon(DLC)coating is widely used as lubricating protective coating for mechanical parts due to its high hardness,high wear resistance and low friction coefficient.However,the traditional DLC coating is prone to increase friction coefficient,crack,bulge/peel and fall off from the substrate under harsh working conditions such as high speed,heavy load and high temperature,which leads to the failure of the coating.Based on process control and substrate treatment,the optimization measures to improve the service performance of DLC coating were reviewed from the aspects of coating deposition process,element doping,transition layer addition,nitriding and carburizing,changing surface roughness and machining surface micro texture.The measures to improve the service performance of DLC coating were analyzed theoretically,and the future research directions were proposed,such as establishing a standardized and unified preparation process and performance characterization method of high-performance DLC coating,and further discussing the influence of different substrate roughness on the mechanical meshing force of the coating,the size effect of micro texture and the thermal stress release effect of DLC coating.