摘要
专用电子束熔炼炉需要大抽速、可靠性较高的真空系统,本文简要介绍了专用电子束熔炼炉真空抽气系统的主要性能指标、设计思路和方法、系统组成,对此真空抽气系统进行了详细的计算,并为类似真空设备的研制提供有益参考。
High speed and high reliability vacuum pumping system is needed for the electron beam melting furnace.This paper described the technical specification,the design ideas and methods,and structure configuration.A detailed calculation of the vacuum pumping system was carried out,which may provide a useful reference to develop similar vacuum equipment.
作者
张志平
许忠政
张黎源
姜正鹤
ZHANG Zhi-ping;XU Zhong-zheng;ZHANG Li-yuan;JIANG Zheng-he(Research Institute of Physics and Chemistry Engineering of Nuclear Industry,Tianjin 300180,China)
出处
《真空》
CAS
2021年第5期42-45,共4页
Vacuum
关键词
电子束熔炼
真空系统
放气量
有效抽速
抽气时间
electron beam melting
vacuum system
outgassing amount
effective pumping speed
pump-down time
