真空涂层设备SIS设计及应用

SIS Design and Application for Vacuum Coating Equipment

研究了真空涂层设备控制系统和工艺安全要求的特性,提出以IEC 62061标准完成设备的SIL评估、SIS设计和SIL验证,完成了整套SIS的集成和应用研发,并实现了SIS与总控系统的信息交互和联锁保护,研发的SIS已经使用到多套真空涂层设备之中,有效地保护了人身和财产安全。

We studied the characteristics of control system and process safety requirements for vacuum coating equipment,and completed SIL evaluation,SIS design and SIL verification of equipment according to the IEC 62061 standard,completed the integration and application research of the whole SIS,and realized the information interaction and interlock protection between SIS and the main control system.The as-developed SIS has been used in a number of vacuum coating equipment and it effectively protects the safety of people and property.