摘要
基于光弹调制器(PEM)的高速椭偏测量法具有测量速度快,灵敏度高的优势,目前已被广泛应用于半导体、显示器和军工等领域。现有PEM光学模型验证方法大多采用谐波分量提取法,但其受系统偏差影响较大。该文提出一种基于最优化方法——PEM光学模型验证法,该方法将椭偏测量过程转化成最优化问题进行求解,将系统参数作为自变量进行处理,可抑制系统偏差造成的影响,提高测量系统的鲁棒性。该文介绍了该方法的基本原理,并通过数值仿真和椭偏测量光学实验进行了验证。结果表明,该方法可有效地抑制系统参数偏差对测量精度的影响。
The high-speed ellipsometry based on photo-elastic modulator(PEM)has the advantages of fast measurement speed and high sensitivity,and has been widely used in semiconductor,display,military and other fields at present.Most of the existing PEM optical model verification methods adopt the method of harmonic component extraction,but it is greatly affected by the system deviation.A verification method of optical model of photoelastic modulator based on optimization method is proposed in this paper.This method transforms the ellipsometry process into an optimization problem for solving,and treated the system parameters as independent variables,so as to suppress the influence caused by the system deviation and improve the robustness of the measurement system.The basic principle of the method is introduced in this paper,and its feasibility is verified by numerical simulation and experiment.The results show that the proposed method can effectively suppress the influence of system parameter deviation on measurement accuracy.
作者
何彤
熊伟
李超波
HE Tong;XIONG Wei;LI Chaobo(School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100029, China;Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100039, China;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, State Key Laboratory of Applied Optics, Changchun 130033, China)
出处
《压电与声光》
CAS
北大核心
2021年第5期661-665,共5页
Piezoelectrics & Acoustooptics
基金
应用光学国家重点实验室基金资助项目(SKLAO-201916)
中国科学院合肥大科学中心“高端用户培育基金”资助项目(2019HSC-UE011)。
关键词
光弹调制器
高速椭偏测量方法
最优化
系统参数
鲁棒性
photoelastic modulator
high speed ellipsometry method
optimization
system parameters
robustness
