摘要
TCO/M/TCO三层透明导电薄膜具有可见光区透光率高、导电性好且超薄的特点,适用于包括柔性基底在内的电子器件的透明导电电极。本文阐述三层透明导电氧化物/金属/透明导电氧化物(TCO/M/TCO)薄膜透光导电原理,厚度设计及其对光电性能的影响,金属层的选择及作用机制,溅射氛围和后处理工艺对薄膜性能的影响。
Triple-layer transparent conductive films of TCO/M/TCO have the characteristics of high transmittance in visible light region,good conductivity,and ultrathin,and they are suitable for transparent conductive electrode of electronic devices including flexible substrate.In this paper,the principles of light transmission and conductivity of TCO/M/TCO films,the thickness design and its effects on photoelectrical properties,the selection of the metal layer and its mechanisms of action,the effects of sputtering atmosphere and post-treatment process on the properties of TCO films are described.
作者
闫彩波
周艳文
粟志伟
王鼎
杨东明
YAN Caibo;ZHOU Yanwen;WANG Ding;YANG Dongming(School of Materials and Metallurgy,University of Science and Technology Liaoning,Anshan 114051,China)
出处
《辽宁科技大学学报》
CAS
2021年第4期241-248,共8页
Journal of University of Science and Technology Liaoning
基金
国家自然科学基金(51972155、51672119、51372109、51172101及50872048)
辽宁科技大学大学生创新创业训练计划(202010146001S)。
