丝网印刷法制备GPP芯片工艺

Preparation of GPP Chips Based on Screen Printing Method

玻璃钝化类器件(Glassivation Passivation Parts,GPP)是在普通硅整流扩散片的基础上对拟分割的管芯P/N结面四周烧制1层玻璃,由于玻璃与单晶硅有很好的结合特性,使P/N结可获得最佳保护,提高器件的稳定性。文章通过试验完成了丝网印刷法的工业化生产,确定了丝网印刷保护层浆料工艺、丝网印刷玻璃层浆料工艺和丝网印刷玻璃层的烘干工艺,实现了丝网印刷法制备GPP芯片25万片/月的工业化生产能力。

Glassivation passivation parts(GPP) is a general term for glass passivation devices. Based on the ordinary silicon rectifier diffusion sheet, a layer of glass is burned around the P/N junction surface of the pipe core to be divided. The glass has a good combination characteristic with monocrystalline silicon, which can make the P/N junction obtain the best protection and improve the stability of the device. By completing the industrial production of screen printing through experiments, the paste of screen printing protective layer, screen printing glass layer slurry technology and the drying process of screen printing glass layer were determined,and the industrial production capacity of 250 000 GPP wafers per month by screen printing was realized.