硅烷流化床法生产粒状多晶硅

Progress on Preparation of Granular Polysilicon by Fluidized-bed Silane Pyrolysis

文章简述了改良西门子法和硅烷流化床法两种主要的多晶硅生产方法及发展现状。阐述了硅烷流化床生产制备粒状硅的原理,包括均相反应和异相反应两种经典机理分解、沉积生成粒状多晶硅。重点分析了目前流化床在工业化生产方面存在的技术难题以及现有和潜在的解决方案,对于今后硅烷流化床生产粒状多晶硅的发展具有重要意义。

In this paper,two main polysilicon production methods,improved Siemens process and silane fluidized bed process,and their development status are described.The principle of silane fluidized bed production of granular silicon,including two classical mechanisms of homogeneous reaction and heterogeneous reaction is described.The technical problems and the existing and potential solutions in the industrial production of fluidized bed are analyzed,which is of great significance for the development of granular polysilicon production in silane fluidized bed.