多晶硅尾气吸收影响因素研究

Study on Influencing Factors of Polysilicon Exhaust Gas Absorption

多晶硅尾气吸收单元主要分离还原尾气中的HCl和氯硅烷,降低尾气中HCl和氯硅烷含量,减小下游活性炭吸附的负荷。运用流程模型软件Aspen Plus对吸收过程进行模拟,对尾气吸收单元的喷淋吸收剂量、吸收剂组分、吸收剂温度、吸收塔压力和吸收塔的进气温度等各种影响因素进行模拟和灵敏度分析,得出尾气吸收的有利条件为温度-70~-65℃,压力1.0~1.2 MPa;适度增加吸收剂用量,改善吸收剂组分也有利于提高吸收效果。

The polysilicon tail gas absorption unit mainly separates and reduces HCl and chlorosilane in the tail gas,reduces the content of HCl and chlorosilane in the tail gas,and reduces the load of downstream activated carbon adsorption.The absorption process is used to simulate by the process model software Aspen Plus,and various influencing factors such as the spray absorbed dose,the absorbent composition,the temperature of the absorbent,the pressure of the absorption tower and the inlet temperature of the absorption tower of the exhaust gas absorption unit are simulated and analyzed.Sensitivity analysis shows that the favorable conditions for exhaust gas absorption are-70~-65℃temperature and 1.0~1.2 MPa of pressure.A moderate increase in the amount of absorbent and improvement of absorbent components are also beneficial to increase the absorption effect.