MEMS安全与解除隔离装置发展现状及趋势

An Overview on the Development of MEMS S&A Device

MEMS技术是未来提升武器性能最有发展前途的技术之一,引信MEMS安全与解除隔离(S&A)装置具有体积小、成本低,易于和引信起爆控制电路集成等优点,国内外对MEMS安全与起爆技术开展了深入的研究。针对引信MEMS S&A装置研究进展,在收集、分析国内外大量文献资料的基础上,总结了引信MEMS S&A装置发展现状及趋势。按照解除隔离的驱动力类型,将MEMS S&A装置划分为惯性力驱动、电热驱动、火药能量驱动三种类型。结合各类型典型装置的分析,分别总结了其技术特征,研判出MEMS S&A装置发展的三个趋势:硅基工艺制作MEMS S&A装置的结构以分层平行基板式,体积更小,更适于大规模生产;微火工品集成在MEMS S&A装置中一体化设计制造;MEMS S&A装置、含能材料设计与制作在一片或多片芯片上,并与微电子系统集成出片(状)上引信。

Micro-electro-mechanical systems(MEMS)is one of the most promising technologies to improve weapon performance in the future.With advantages of small size,low cost,and better integration and compatibility with fuze initiation control circuit,MEMS safety and arming(S&A)devices have been intensively studied at home and abroad.The development status and trend of MEMS S&A devices are summarized on the basis of a large number of literatures.According to the type of actuation force for arming,MEMS S&A devices can be categorized into three groups:inertial actuation,electrothermal actuation and pyrotechnic actuation based on a large number of domestic and foreign documents.The technical characteristics of three types of devices are thoroughly summarized combining with analysis of various types of typical devices,and three development trends of MEMS S&A devices are identified.It is indicated that:The structure of MEMS S&A device fabricated by silicon-based technology is a layered parallel substrate type,which is smaller in size and more suitable for mass production;MEMS S&A device and micro-initiator will be highly integrated in design and manufacturing;MEMS S&A device and energetic materials will be designed and manufactured on one or more chips,and integrated with microelectronic systems to produce an on-chip fuze.