用于等离子体射流装置的高压变频脉冲源研究

Study of the High Voltage Frequency Conversion Pulsed Power Supply Used in Plasma Jet Equipment

为研究某种等离子体射流装置在常温常压空气中的放电特性,设计了一种可输出准正弦波电压幅度最高为20 kV、重复工作频率1 Hz~100 kHz可调,功率约为5 kW的等离子体高压变频脉冲源。设计上采用金属-氧化物半导体场效应晶体管(MOSFET)构建全桥拓扑电路,利用开关电源软开关技术原理,将初级能量转移到全桥式串联谐振逆变器上,通过控制芯片施加驱动脉冲信号,经高频脉冲变压器变换后输出高幅度脉冲电压。在间歇或连续工作模式下,该脉冲源输出的高压准正弦波脉冲信号,被加载至等离子体射流装置上,该装置经高压脉冲作用下击穿放电后产生等离子体射流。通过实验结果验证了所采用的设计原理及方法的可行性,给出了不同工作频率条件下得到的实验结果。

To study the characteristics of the plasma jet at room temperature,the high voltage frequency conversion pulsed power supply,with the output voltage 20 kV,frequency 1 Hz~100 kHz,and pulsed power 5 kW,has been developed based on the soft switching technology of high frequecy switching power supply.The power circuit of pulsed power supply uses the full-bridge topology based on metal-oxide-semiconductor field-effect transistor(MOSFET).The series resonant inverter has been controlled by logic control chips,and the energy transmit to the plasma jet equipment via a high-frequency power pulse transformer.The experiment results show that the the plasma jet equipment using the designed pulsed power supply can produce atmospheric pressure plasma jets at room temperature.