旋转型超声电机压电振子的研究

Research on Piezoelectric Vibrators of Rotary Ultrasonic Motors

运用ANSYS软件对圆盘形压电振子进行模态分析,分析了圆环凸齿高、附加齿高对弯曲模态的影响。结果表明,当凸齿高为2.1 mm、附加齿高为0.6 mm时,圆盘形压电振子具有理想的振型且齿的位置最佳。根据模态分析结果试制了圆盘形振子,进行了实验测试,实验结果与模态分析结果大致相同。

The modal analysis of disc piezoelectric vibrator is carried out by using ANSYS software,and the influence of ring convex tooth height and additional tooth height on bending mode is introduced.The analyses show that when the convex tooth height is 2.1 mm and the additional tooth height is 0.6 mm,the disc piezoelectric vibrator has ideal vibration mode and the best position of teeth.According to the results of modal analysis,the disk-shaped vibrator was manufactured and tested.The experimental results of operating frequencies of the vibrator are given,which show that they are essentially consistent with those of modal analyses.