摘要
近年来,随着三维微电子器件及微系统技术的迅速发展,微小型化逐渐成为机器人领域最重要的发展趋势之一。薄膜类微型机器人具有体积小、重量轻、鲁棒性高、柔韧性好、与平面制备工艺兼容等优点,因而是一类极具潜力的微型机器人,具有重要的研究价值。本文首先综述了薄膜类柔性微型机器人的代表性制备方法,随后,较为全面地回顾了基于不同驱动机制的薄膜类机器人,并对该领域所面临的机遇与挑战进行了展望与讨论。
With rapid development of three-dimensional(3D)microelectronics and microsystems technologies in recent years,the miniaturization of robots has received increasingly growing attention.Thin-film-based miniaturized robots rep⁃resents a very promising research direction,since these robots combine versatile features of small size,lightweight,good robustness,high flexibility and excellent compatibility with modern planar technologies.This article reviews the fabrica⁃tion methods of thin-film-based flexible miniaturized robots,followed by discussions on the various actuation mecha⁃nisms exploited by flexible miniaturized robots.Finally,more opportunities and challenges in this research area are dis⁃cussed.
作者
庞文博
徐世威
张一慧
PANG Wenbo;XU Shiwei;ZHANG Yihui(Applied Mechanics Laboratory,Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China;Cen-ter for Flexible Electronics Technology,Tsinghua University,Beijing 100084,China)
出处
《河北工业大学学报》
CAS
2021年第5期1-22,共22页
Journal of Hebei University of Technology
基金
国家自然科学基金(11722217,12050004)。
关键词
薄膜类机器人
微型机器人
三维微组装
柔性机器人
Thin-film-based robots
miniaturized robots
microscale 3D assembly
flexible robots