薄膜类柔性微型机器人研究进展

Thin-film-based miniaturized flexible robots:A brief review

近年来,随着三维微电子器件及微系统技术的迅速发展,微小型化逐渐成为机器人领域最重要的发展趋势之一。薄膜类微型机器人具有体积小、重量轻、鲁棒性高、柔韧性好、与平面制备工艺兼容等优点,因而是一类极具潜力的微型机器人,具有重要的研究价值。本文首先综述了薄膜类柔性微型机器人的代表性制备方法,随后,较为全面地回顾了基于不同驱动机制的薄膜类机器人,并对该领域所面临的机遇与挑战进行了展望与讨论。

With rapid development of three-dimensional(3D)microelectronics and microsystems technologies in recent years,the miniaturization of robots has received increasingly growing attention.Thin-film-based miniaturized robots rep⁃resents a very promising research direction,since these robots combine versatile features of small size,lightweight,good robustness,high flexibility and excellent compatibility with modern planar technologies.This article reviews the fabrica⁃tion methods of thin-film-based flexible miniaturized robots,followed by discussions on the various actuation mecha⁃nisms exploited by flexible miniaturized robots.Finally,more opportunities and challenges in this research area are dis⁃cussed.