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基于偏振透射结构光的透明物体表面缺陷检测方法 被引量:15

Surface Defect Detection in Transparent Objects Using Polarized Transmission Structured Light
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摘要 玻璃、透镜等透明物体在光学系统中有广泛的应用,表面质量优劣对系统性能有较大的影响。利用光的偏振特性,提出一种基于偏振透射结构光的表面缺陷检测方法。利用所搭建的透射系统产生偏振透射条纹结构光,该结构光投射到被测物体表面,经被测物体后发生变形;然后采集变形条纹,提取相位信息,解出调制度,得到被测物体的表面缺陷信息。实验结果表明:所提方法能够消除灰尘的影响,并可以有效提高系统信噪比,有望用于平板厚透镜、大曲率光学透镜等透明物体的缺陷检测。 Transparent objects such as glass and lenses are commonly used in optical systems,and their surface quality greatly affects the performance of the host systems.Considering polarization characteristics of light,surface defect detection method using polarized transmission structured light is proposed.The constructed transmission system generates fringe-encoded polarized structured light for projection onto the surface of the measured object.The structured light deforms after passing through the object.Then,the deformation fringes are collected,phase information is extracted,modulation is solved,and surface defect information is obtained from the measured object.Experimental results show that the proposed method can eliminate the effect of dust and improve the signal-to-noise ratio for detection.Therefore,the proposed method can be suitable for surface defect detection in transparent objects such as flat thick lenses and high-curvature optical lenses.
作者 王维 王杰 黄易杨 岳慧敏 刘永 Wang Wei;Wang Jie;Huang Yiyang;Yue Huimin;Liu Yong(School of OptoElectronic Science and Engineering,Universitity of Electronic Science and Technology of China,Chengdu,Sichncvi 611731,China)
出处 《光学学报》 EI CAS CSCD 北大核心 2021年第18期120-127,共8页 Acta Optica Sinica
基金 国家自然科学基金(62075032)。
关键词 测量 表面缺陷检测 透射光学元件 偏振透射结构光 条纹调制度 measurement surface defect detection transmission optical element polarized transmission structured light fringe modulation
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