基于SIW结构的毫米波MEMS滤波器设计

Design of Millimeter Wave MEMS Filter Based on SIW Structure

针对5G毫米波无线通信的发展需求,采用硅基单层基片集成波导(SIW)结构设计了一款毫米波滤波器。首先通过理论分析,计算得到滤波器的结构参数。然后使用电磁仿真软件HFSS对滤波器结构进行仿真与优化,使其满足设计指标要求。设计得到了一个五阶毫米波滤波器,其通带范围24.25~27.5 GHz,相对带宽12.56%,中心频率处插入损耗小于1 dB,带内回波损耗优于-16 dB。最后,使用MEMS工艺将该滤波器加工成实物并进行性能测试,得到尺寸为9.45 mm×4.8 mm×0.4 mm的滤波器芯片,达到小型化要求。测试结果表明,MEMS毫米波滤波器的仿真结果与测试结果基本保持一致。

In this paper, a millimeter-wave filter is designed by using a silicon-based single-layer substrate integrated waveguide(SIW) structure for the development of 5 G millimeter-wave wireless communication. Firstly, the structure parameters of the filter are calculated via theoretical analysis. Then the electromagnetic simulation software HFSS is utilized to simulate and optimize the filter structure to meet the requirements. A fifth order millimeter wave filter is designed. Its passband range is 24.25-27.5 GHz, the relative bandwidth is 12.56%, the insertion loss at the center frequency is less than 1 dB, and the in band return loss is better than-16 dB. Finally, the filter is processed into a physical object using a MEMS process and its performance is tested. The size of the filter is 9.45 mm×4.8 mm×0.4 mm, which is achieving miniaturization requirements. It is shown that the simulation results of the MEMS millimeter wave filter are basically consistent with the test results.