分散剂对99.8%高纯氧化铝喷雾造粒粉的影响

Effect of Dispersant on 99.8%High-purity Alumina Spray Granulation Powder

本文介绍了聚羧酸铵盐、丙烯酸树脂、丙烯酸铵盐3种分散剂对半导体行业核心部件用99.8%高纯氧化铝陶瓷喷雾造粒粉的影响。通过氧化铝陶瓷材料的配方设计,调控球磨分散工艺,制备粒度集中、分散均匀的料浆;之后进行喷雾造粒,制备出颗粒级配合理、球形度好、流动性好的喷雾造粒粉体;通过电子显微镜测定造粒粉的球形度、颗粒大小,最终选定了丙烯酸树脂分散剂作为最优分散剂,其合适的添加量为0.40%~0.80%。丙烯酸树脂分散剂浆料喷雾造粒粉体的球形度高,无缺陷,颗粒大小约在45~150μm之间。流动时间为21s,松装密度为1.16g/cm^(3),该粉体具有良好的流动性和松装密度,有利于压制高密度的99.8%高纯氧化铝坯体。

This paper introduced the effects of three dispersants,ammonium polycarboxylate,acrylic resin and ammonium acrylate,on 99.8%high purity alumina ceramic spray granulation powder for core components in the semiconductor industry.Through the formulation design of alumina ceramic materials,the grinding and dispersion process was regulated to prepare concentrated and uniformly distributed slurry,followed by spray granulation to produce a spray granulated powder with suitable particle size,good sphericity and good flowability.The sphericity and particle size of the granulated powder were determined by scanning electron microscopy.The acrylic resin dispersant was finally selected as the optimal dispersant with a suitable addition amount of 0.40%to 0.80%.The acrylic resin dispersant slurry spray granulation powder has high sphericity and no defects.The particle size of its spray granulation powder was about 45 to 150μm.With a flow time of 21 s and a bulk density of 1.16 g/cm^(3),the powder has good flowability and bulk density,which is favorable for pressing highdensity 99.8%high-purity alumina body.